
Handbook of Thin Film Deposition
2 contributors - Paperback
£175.00
Formerly Assistant Professor in Materials Science at the University of Arizona and has extensive professional experience as a technologist with both the IBM and Intel Corporations. Dr. Seshan passed away in 2017. Dominic Schepis has over 35 years in the semiconductor industry supporting Logic and Memory technologies. As Principal Member of the Technical Staff at GlobalFoundries, Dominic worked on process development and integration for 14nm and advanced node CMOS technologies. His early work on SOI CMOS integration led to the first IBM Mainframes to use this technology. He also served on the patent evaluation board at IBM and GlobalFoundries in East Fishkill, NY. A graduate from Rensselaer Polytechnic Institute, he joined IBM Microelectronics in 1980 and has worked on a variety of research and development projects and process sectors including: reactive ion etching, epitaxial film growth, process integration and thin film processing. During his tenure there, he co-authored over 25 technical journal papers and has over 100 issued US patents.