Thin Films On Silicon: Electronic And Photonic Applications

Alexander A Demkov editor Vijay Narayanan editor Martin M Frank editor

Format:Hardback

Publisher:World Scientific Publishing Co Pte Ltd

Published:3rd Oct '16

Currently unavailable, and unfortunately no date known when it will be back

Thin Films On Silicon: Electronic And Photonic Applications cover

This volume provides a broad overview of the fundamental materials science of thin films that use silicon as an active substrate or passive template, with an emphasis on opportunities and challenges for practical applications in electronics and photonics. It covers three materials classes on silicon: Semiconductors such as undoped and doped Si and SiGe, SiC, GaN, and III-V arsenides and phosphides; dielectrics including silicon nitride and high-k, low-k, and electro-optically active oxides; and metals, in particular silicide alloys. The impact of film growth and integration on physical, electrical, and optical properties, and ultimately device performance, is highlighted.

ISBN: 9789814740470

Dimensions: unknown

Weight: unknown

552 pages