III-V Integrated Circuit Fabrication Technology

"Drawing from decades of directly relevant experience in the field, the authors have created a modern, comprehensive review of all aspects of compound semiconductor IC fabrication, useful for both experts in the field and newcomers wanting to gain familiarity with the topic. This book contains extensive references, plus useful appendices of constants, acronyms, and material properties, making it a handy and often-pulled-off-the-shelf resource for CS professionals."
—Dr. Martin J. Brophy, Senior GaAs Test, Reliability, and Development Engineer, Avago Technologies

"This book will be greatly appreciated by researchers and students engaged in work with III–V semiconductors. With the primary focus on GaAs-based HBTs and related devices, the book also describes critical issues for emerging technologies such as GaN and RF MEMS. It brings together process information and insights from widely dispersed sources and provides a physics and chemistry background, along with up-to-date process design considerations, meeting several important needs of the III–V fabrication community."
—Prof. Peter Asbeck, Department of Electrical and Computer Engineering, University of California