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Plasma-Surface Interactions of Advanced Photoresist Systems

Sebastian Engelmann author

Format:Paperback

Publisher:VDM Verlag

Published:18th Sep '09

Currently unavailable, and unfortunately no date known when it will be back

Plasma-Surface Interactions of Advanced Photoresist Systems cover

This paperback, "Plasma-Surface Interactions of Advanced Photoresist Systems" from Sebastian Engelmann, was published 18th September 2009 by VDM Verlag.

ISBN: 9783639178241

Dimensions: 229mm x 152mm x 10mm

Weight: 259g

172 pages