Nanopositioning Technologies
Fundamentals and Applications
Yu Sun editor Changhai Ru editor Xinyu Liu editor
Format:Paperback
Publisher:Springer International Publishing AG
Published:30th Mar '18
Currently unavailable, and unfortunately no date known when it will be back
This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.
ISBN: 9783319795393
Dimensions: unknown
Weight: 635g
409 pages
Softcover reprint of the original 1st ed. 2016