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Nanopositioning Technologies

Fundamentals and Applications

Yu Sun editor Changhai Ru editor Xinyu Liu editor

Format:Paperback

Publisher:Springer International Publishing AG

Published:30th Mar '18

Currently unavailable, and unfortunately no date known when it will be back

Nanopositioning Technologies cover

This book covers the state-of-the-art technologies for positioning with nanometer resolutions and accuracies, particularly those based on piezoelectric actuators and MEMS actuators. The latest advances are described, including the design of nanopositioning devices, sensing and actuation technologies and control methods for nanopositioning. This is an ideal book for mechanical and electrical engineering students and researchers; micro and nanotechnology researchers and graduate students; as well as those working in the precision instrumentation or semiconductor industries.

ISBN: 9783319795393

Dimensions: unknown

Weight: 635g

409 pages

Softcover reprint of the original 1st ed. 2016