Wafer Fabrication
Automatic Material Handling System
Format:Hardback
Publisher:De Gruyter
Published:24th Sep '18
Currently unavailable, and unfortunately no date known when it will be back
This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.
ISBN: 9783110486902
Dimensions: unknown
Weight: 675g
284 pages