Wafer Fabrication

Automatic Material Handling System

Jie Zhang author

Format:Hardback

Publisher:De Gruyter

Published:24th Sep '18

Currently unavailable, and unfortunately no date known when it will be back

Wafer Fabrication cover

This book systematically introduces modeling, performance evaluation and applications of Automatic Materiel Handling System (AMHS) in semiconductor manufactucing, and focuses discussion on the coordination of two subsystems. Resources dispatch and optimization are conducted on operational research combined with cases studies. Written in a practical way, it is an essential reference for researchers and engineers in manufacturing and management.

ISBN: 9783110486902

Dimensions: unknown

Weight: 675g

284 pages