Microactuators, Microsensors and Micromechanisms

This volume compiles research from the 6th Conference on Microactuators, Microsensors and Micromechanisms, showcasing advancements in micro-technology.

This book presents a comprehensive collection of investigations that merge theoretical insights with experimental findings. It explores various systems, including flexure hinges and compliant mechanisms specifically designed for precision applications. Furthermore, the text delves into non-linear analytical modeling of compliant mechanisms, mechanical systems utilizing compliance, and innovative designs such as bipedal robots and reconfigurable tensegrity systems. The discussion also extends to micro-electro-mechanical systems (MEMS), highlighting their role as energy-efficient micro-robots, along with topics like microscale force compensation, magnetoelectric micro-sensors, and acoustical actuators. The importance of wafer bonding technology in MEMS fabrication is also emphasized.

The volume compiles contributions presented at the 6th Conference on Microactuators, Microsensors and Micromechanisms (MAMM), which took place in Hyderabad, India, in December 2022. This conference served as a unique platform for experts to exchange knowledge and foster collaboration across various disciplines related to micro-technology. Participants engaged in discussions that spanned a wide range of topics, reflecting the diverse applications and advancements within the field.

Organized under the auspices of the International Federation for the Promotion of Mechanism and Machine Science (IFToMM), this conference aimed to facilitate a deeper understanding of the intricate systems involved in microactuation and microsensing. Microactuators, Microsensors and Micromechanisms thus serves as a vital resource for researchers and practitioners seeking to stay abreast of the latest developments in this rapidly evolving area of study.