Mechanical Properties of Silicon Based Compounds: Silicides

Joshua Pelleg author

Format:Paperback

Publisher:Springer Nature Switzerland AG

Published:14th Aug '20

Currently unavailable, and unfortunately no date known when it will be back

Mechanical Properties of Silicon Based Compounds: Silicides cover

This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. The author also presents dislocation in silicides, fatigue and fracture aspects. A special chapter is given on deformation in silicides in the nano scale. Composites and alloys are also considered.

ISBN: 9783030226008

Dimensions: unknown

Weight: unknown

274 pages

1st ed. 2019