Mechanical Properties of Silicon Based Compounds: Silicides
Format:Paperback
Publisher:Springer Nature Switzerland AG
Published:14th Aug '20
Currently unavailable, and unfortunately no date known when it will be back
This book focuses on the mechanical properties of silicides for very large scale integration (VLSI) applications. It presents the fabrication process for bulk silicides and thin films, and list complete testing deformation for a variety of silicon based compounds. The author also presents dislocation in silicides, fatigue and fracture aspects. A special chapter is given on deformation in silicides in the nano scale. Composites and alloys are also considered.
ISBN: 9783030226008
Dimensions: unknown
Weight: unknown
274 pages
1st ed. 2019