Fabrication of GaAs Devices
Albert G Baca author Carol IH Ashby author
Format:Hardback
Publisher:Institution of Engineering and Technology
Published:1st Sep '05
Should be back in stock very soon
This book provides fundamental and practical information on all aspects of GaAs processing and gives pragmatic advice on cleaning and passivation, wet and dry etching and photolithography. Other topics covered include device performance for HBTs (Heterojunction Bipolar Transistors) and FETs (Field Effect Transistors), how these relate to processing choices, and special processing issues such as wet oxidation, which are especially important in optoelectronic devices. This book is suitable for both new and practising engineers.
ISBN: 9780863413537
Dimensions: unknown
Weight: unknown
368 pages