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MEMS and MOEMS Technology and Applications

Prosenjit Rai-Choudhury author

Format:Paperback

Publisher:SPIE Press

Currently unavailable, and unfortunately no date known when it will be back

MEMS and MOEMS Technology and Applications cover

Cost, size, speed, weight, and precision are driving the miniaturization of mechanical systems. This book presents a detailed look at two micromachining technologies that have evolved from the integrated circuits industry: MEMS (micro-electromechanical systems) and MOEMS (micro systems with a strong optical component). It is useful as a professional reference, technology user's guide, and as a textbook.

ISBN: 9780819495983

Dimensions: unknown

Weight: unknown

528 pages