Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology
Format:Hardback
Publisher:William Andrew Publishing
Published:17th Apr '15
Currently unavailable, and unfortunately no date known when it will be back
Written by a world-renowned expert, this first book solely dedicated to electrochemical micromachining (EMM) focuses on applications in the semiconductor industry and on future directions of increasingly important EMM technology
Electrochemical Micromachining for Nanofabrication, MEMS and Nanotechnology is the first book solely dedicated to electrochemical micromachining (EMM). It begins with fundamentals, techniques, processes, and conditions, continuing with in-depth discussions of mechanisms of material removal, including an empirical model on the material removal rate for EMM (supported by experimental validation). The book moves next to construction-related features of EMM setup suitable for industrial micromachining applications, varying types of EMM, and the latest developments in the improvement of EMM setup. Further, it covers power supply, roll of electrolyte, and other major factors influencing EMM processes, and reports research findings concerning the improvement of machining accuracy and efficiency. Finally, the book devotes a chapter to the design and development of micro-tools, one of the most vital components in EMM.
"This book is an excellent addition to the nanotechnology literature…The book will be very useful to professionals as well as nonprofessionals who are interested in electrochemical micromachining. I strongly recommend this book for scientists, engineers, and those who wish to teach this subject." --MRS Bulletin
ISBN: 9780323327374
Dimensions: unknown
Weight: 840g
296 pages