Plasma Processing of Materials

Plasma processing of materials is a critical technology to several of the largest manufacturing industries in the world—electronics, aerospace, automotive, steel, biomedical, and toxic waste management. This book describes the relationship between plasma processes and the many industrial applications, examines in detail plasma processing in the electronics industry, highlights the scientific foundation underlying this technology, and discusses education issues in this multidisciplinary field.

The committee recommends a coordinated, focused, and well-funded research program in this area that involves the university, federal laboratory, and industrial sectors of the community. It also points out that because plasma processing is an integral part of the infrastructure of so many American industries, it is important for both the economy and the national security that America maintain a strong leadership role in this technology.

Table of Contents

• FRONT MATTER
• 1 SUMMARY, FINDINGS, CONCLUSIONS, AND RECOMMENDATIONS
• 2 PLASMA PROCESSING AND LOW-ENERGY PLASMA SCIENCE
• 3 PLASMA PROCESSING IN THE ELECTRONICS INDUSTRY
• 4 SCIENTIFIC FOUNDATION OF PLASMA PROCESSING
• 5 EDUCATIONAL ISSUES
• APPENDIX: PARTICIPANTS IN WORKSHOP ON PLASMA PROCESSING OF MATERIALS
<