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Ion Implantation into Semiconductors, Oxides and Ceramics

BG Svensson editor HA Atwater editor JKN Lindner editor PLF Hemment editor

Format:Hardback

Publisher:Elsevier Science & Technology

Published:1st Mar '99

Currently unavailable, and unfortunately no date known when it will be back

Ion Implantation into Semiconductors, Oxides and Ceramics cover

These proceedings contain the reviewed papers presented at the Symposium J on "Ion Implantation into Semiconductors, Oxides and Ceramics", which was held at the Spring Meeting of the European Materials Research Society in Strasbourg, France, 16-19, June 1998. The symposium attracted 110 contributions, with authors from 31 nations in 5 continents. It was thereby the largest in a series of E-MRS ion beam symposia, documenting the importance of ion beam techniques and research in this area. The aim of this symposium was to provide a forum for the discussion of new results in the implantation of materials from three different classes: semiconductors, oxides and ceramics.

ISBN: 9780080436135

Dimensions: unknown

Weight: 1490g

454 pages